台积电：先进制程暂无需High NA EUV技术支持

DoNews05-28

在荷兰阿姆斯特丹举行的2025年技术论坛欧洲场中，台积电资深副总经理张晓强表示，公司目前暂无为先进制程导入High NA EUV的计划。他指出，最新公布的1.4nm级逻辑制程A14即便未采用High NA EUV图案化设备，性能提升依然显著。

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一割
05-28
一割
台积电都发展到1.4纳米了

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