阿斯麦新一代EUV光刻机据悉已具备量产条件_老虎社区_美港股上老虎

阿斯麦新一代EUV光刻机据悉已具备量产条件

格隆汇02-27

荷兰光刻设备制造商阿斯麦高管表示，公司新一代极紫外光刻机已准备就绪，芯片制造商可开始将其用于大规模生产。该设备单价约4亿美元，为初代EUV机型的两倍。阿斯麦首席技术官马尔科·皮特斯称，该设备已累计加工约50万片硅晶圆，停机时间极低，图案精度达到量产标准。

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